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发明名称
Method of ion implantation for achieving desired dopant concentration
摘要
申请公布号
GB0510245(D0)
申请公布日期
2005.06.29
申请号
GB20050010245
申请日期
2002.08.30
申请人
AGERE SYSTEMS GUARDIAN CORPORATION
发明人
分类号
H01L21/8238
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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