apparatus and method for magnetron sputtering of rocking magnet type,申请号KR20030001315-传众专利搜索

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发明名称	apparatus and method for magnetron sputtering of rocking magnet type
摘要
申请公布号	KR100497933(B1)	申请公布日期	2005.06.29
申请号	KR20030001315	申请日期	2003.01.09
申请人		发明人
分类号	C23C14/35;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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