| 发明名称 |
Method and apparatus of fabricating flat panel display |
| 摘要 |
A method of fabricating a flat panel display device including, coating an etch-resist 33a on a thin film 32a; forming a soft mold 34 having a groove 34a and a protrusion 34b for patterning the thin film 32a; treating an end surface of the protrusion 34b; applying the soft mold 34 to the etch-resist 33a to form an etch-resist pattern 33b; separating the soft mold 34 from the etch-resist pattern 33b; and etching the thin film 32a by using the etch-resist pattern 33b to form a thin film pattern. |
| 申请公布号 |
GB2409574(A) |
申请公布日期 |
2005.06.29 |
| 申请号 |
GB20040025499 |
申请日期 |
2004.11.18 |
| 申请人 |
* LG PHILLIPS LCD CO. LTD |
发明人 |
JIN WUK * KIM |
| 分类号 |
G02F1/13;C30B33/00;G02F1/133;G02F1/1362;G02F1/1368;G03F7/00;G03F7/20;G09F9/00;G09F9/30;H01J9/24;H01L21/00;H01L21/027;H01L21/3105;H01L21/3213;H01L21/70;H01L21/768;(IPC1-7):H01L21/768;G02F1/136;H01L21/321 |
主分类号 |
G02F1/13 |
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