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发明名称
MANUFACTURING METHOD FOR PHOTO MASK
摘要
申请公布号
KR20050065156(A)
申请公布日期
2005.06.29
申请号
KR20030096924
申请日期
2003.12.24
申请人
HYNIX SEMICONDUCTOR INC.
发明人
JEONG, KU CHEOL
分类号
G03F1/80;G03F7/26;(IPC1-7):G03F1/08
主分类号
G03F1/80
代理机构
代理人
主权项
地址
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