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发明名称
WHOLE EXPOSURE SYSTEM OF WAFER EDGE AND METHOD FOR EXPOSURE OF WAFER EDGE
摘要
申请公布号
KR20050064344(A)
申请公布日期
2005.06.29
申请号
KR20030095703
申请日期
2003.12.23
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, DAE JOUNG;SHIM, WOO SEOK;KIM, MI YOUN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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