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发明名称
METHOD FOR FORMING POLYSILICON PLUG OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20050064591(A)
申请公布日期
2005.06.29
申请号
KR20030096072
申请日期
2003.12.24
申请人
HYNIX SEMICONDUCTOR INC.
发明人
PARK, HYUNG SOON;LEE, MIN SUK;LEE, SANG ICK;SOHN, HYUN CHUL
分类号
H01L21/28;H01L21/3205;H01L21/336;H01L21/44;H01L21/4763;H01L21/60;H01L21/768;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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