发明名称 APPARATUS FOR CARRYING SUBSTRATE
摘要 An apparatus for carrying a substrate in which the time required for the switching work of the type of flat panel display, or the like, can be shortened. A substrate supporting section (10) has a supporting section body (11) provided, on the outer circumference thereof, as a part to be coupled with an extension supporting part (20), with an end part (11a) being fitted to an end part (21b) provided on the inner circumference of a supporting section body (21). When a small glass substrate (41) is carried, it is supported only by the substrate supporting section (10) and when a large glass substrate (41') is carried, it is supported under a state where the extension supporting part (20) is extended to the substrate supporting section (10).
申请公布号 KR20050065681(A) 申请公布日期 2005.06.29
申请号 KR20057009764 申请日期 2005.05.30
申请人 SHIBAURA MECHATRONICS CORPORATION 发明人 OGIMOTO SHINICHI
分类号 B65G49/06;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):B65G49/06;G02F1/13 主分类号 B65G49/06
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