发明名称 |
Apparatus and method for driving mems structure and detecting motion of the driven mems structure using a single electrode |
摘要 |
Apparatus and a method for driving and detecting a motion of MEMS structure using single electrode. Apparatus includes a driving signal generation part driving MEMS structure; a motion detection part detecting motion of MEMS structure and outputting a motion current signal; an amplification part amplifying motion current signal and outputting a motion voltage signal; a gain adjustment part amplifying driving signal and outputting an amplified driving signal; a differential circuit part adding and subtracting with respect to signals output from the amplifying part and the gain adjustment part and outputting a motion signal without the driving signal; and a motion signal detection part selecting and outputting a motion signal of a predetermined frequency from the motion signal output from the differential circuit part. The variable capacitor is configured by a movable electrode plate integrally formed with MEMS structure and a fixed electrode plate disposed opposite to the movable electrode plate. <IMAGE> |
申请公布号 |
EP1548403(A1) |
申请公布日期 |
2005.06.29 |
申请号 |
EP20040029996 |
申请日期 |
2004.12.17 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, JONG-PAL;LEE, SANG-WOO;LEE, BYEUNG-LEUL |
分类号 |
B81B7/02;G01C19/5776;G01C19/56;(IPC1-7):G01C19/56 |
主分类号 |
B81B7/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|