发明名称 |
DEVICE FOR CRYSTALLIZATION AND METHOD FOR CRYSTALLIZATION WITH THE SAME |
摘要 |
<p>A sequential lateral solidification (SLS) device and a method of crystallizing silicon using the same is disclosed, wherein alignment keys are formed on a substrate with one mask having a plurality of different patterns, and a crystallization process is progressed in parallel to an imaginary line connecting the alignment keys with information for a distance between the mask and the alignment key. The SLS device includes a laser beam generator for irradiating laser beams; a mask having a plurality of areas; a mask stage for moving the mask loaded thereto, to transmit a laser beam through a selective area of the mask; and a substrate stage for moving a substrate loaded thereto, to change portions of the substrate irradiated with the laser beam passing through the mask.</p> |
申请公布号 |
KR20050064962(A) |
申请公布日期 |
2005.06.29 |
申请号 |
KR20030096577 |
申请日期 |
2003.12.24 |
申请人 |
LG.PHILIPS LCD CO., LTD. |
发明人 |
JUNG, YUN HO;KIM, YOUNG JOO |
分类号 |
H01L21/324;B01D9/00;B23K26/06;H01L21/20;H01L21/268;H01L21/77;H01L21/84;(IPC1-7):H01L21/324 |
主分类号 |
H01L21/324 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|