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发明名称
A METHOD OF CRYSTALLIZING SI AND AN APPARATUS FOR CRYSTALLIZING SI
摘要
申请公布号
KR20050064367(A)
申请公布日期
2005.06.29
申请号
KR20030095727
申请日期
2003.12.23
申请人
LG.PHILIPS LCD CO., LTD.
发明人
YOU, JAE SUNG
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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