| 摘要 |
A turbomolecular vacuum pump ( 1 ) has an inlet ( 3 ) and an outlet ( 4 ) and rotor and stator vanes ( 5 and 6 ), situated between the inlet and outlet. The rotor vanes ( 6 ) have front sides ( 11 ) and rear sides ( 12 ) in relation to the direction of rotation. At least a part of the rotor vanes ( 6 ) have a rear side ( 12 ) which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes ( 6 ) have a front side ( 11 ), which is concave on the suction side and convex on the delivery side.
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