| 发明名称 |
Device for placement of effluent |
| 摘要 |
A device for placement of effluent comprises a substrate positioner, a deposition conduit, and a conduit positioner. The substrate positioner supports and positions a substrate on which effluent exiting from the deposition conduit is to be deposited. The conduit positioner moves an exit end of the deposition conduit relative to the substrate.
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| 申请公布号 |
US6911182(B2) |
申请公布日期 |
2005.06.28 |
| 申请号 |
US20020274247 |
申请日期 |
2002.10.18 |
| 申请人 |
INDIANA UNIVERSITY RESEARCH AND TECHNOLOGY CORPORATION |
发明人 |
TEGELER TONY J.;MECHREF YEHIA;BORAAS KIRK S.;REILLY JAMES P.;NOVOTNY MILOS V. |
| 分类号 |
B01L3/02;G01N30/84;H01J49/04;H01J49/16;(IPC1-7):B01L3/02;B01L11/00;G01N15/06;G01N33/00;G01N33/48 |
主分类号 |
B01L3/02 |
| 代理机构 |
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代理人 |
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