发明名称 Position measuring device and method for determining a position
摘要 A method for position determination in a position measuring device that includes digitizing analog position data from a detector unit within time intervals of an internal clock rate and calculating position data from the digitized data. Determining a period of time Deltat between a pulse of the internal clock until an appearance of an external trigger signal and a processing of at least two position data, together with the period of time Deltat.
申请公布号 US6912476(B2) 申请公布日期 2005.06.28
申请号 US20030415290 申请日期 2003.08.01
申请人 JOHANNAS HEIDENHAM GMBH 发明人 HUBER-LENK HERBERT;DRESCHER JOERG;HAUSSCHMID MATHIAS;REITER HERBERT;STREITWIESER JOHANN;HOLZAPFEL WOLFGANG
分类号 G01B21/00;G01D5/244;G01D5/245;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G06F15/00 主分类号 G01B21/00
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