发明名称 Flash memory device having poly spacers
摘要 A non-volatile memory device includes a substrate having a first active region and a second active region. A first floating gate is provided over the first active region and having an edge, the first floating gate being made of a conductive material. A first spacer is connected to the edge of the first floating gate and being made of the same conductive material as that of the first floating gate. A control gate is provided proximate to the floating gate.
申请公布号 US6911370(B2) 申请公布日期 2005.06.28
申请号 US20030431172 申请日期 2003.05.06
申请人 HYNIX SEMICONDUCTOR, INC. 发明人 WANG HSINGYA ARTHUR;CHOU KAI-CHENG;RABKIN PETER
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/331;H01L21/822 主分类号 H01L21/8247
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