Electro-optical apparatus, electronic device, substrate for use in an electro-optical apparatus, method of producing a substrate for use in an electro-optical apparatus, and light shielding film

摘要

The invention provides a light shielding film having excellent capability of shielding light. The light shielding film includes a barrier layer formed of a material selected from the group including a refractory nitride compound, silicon compound, tungsten compound, tungsten, and silicon, and also includes a metal layer formed of a material selected from the group including a metal in the form of a simple substance or a metal compound, whose high capability of shielding light is degraded when being oxidized.