发明名称 |
X-Y stage system with onboard linear motor |
摘要 |
An X-Y stage system is disclosed which is easy to assemble and compact or slim in construction. Both the X- and Y-stages are allowed to move without getting influence from the magnetic force created by the field magnets. The X-Y stage system has an X-stage movable relatively to a bed through a linear motion guide unit in an X-direction, and a Y-stage movable relatively to the X-stage through another linear motion guide unit in a Y-direction. The linear motors to force the X- and Y-stages are composed of paired field magnets of secondary side held to the bed and the Y-stage, respectively, and armature windings of primary side supported on the opposite sides of the X-stage in a way lying in clearances between the opposing field magnets.
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申请公布号 |
US6911747(B2) |
申请公布日期 |
2005.06.28 |
申请号 |
US20030639591 |
申请日期 |
2003.08.13 |
申请人 |
NIPPON THOMPSON CO., LTD. |
发明人 |
TSUBOI TAKAAKI;IDA EIJI |
分类号 |
B23Q1/62;B23Q5/28;H02K41/03;(IPC1-7):H02K41/00 |
主分类号 |
B23Q1/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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