THIN FILM THICKNESS GAUGING METHOD USING CsITl SCINTILATOR, INTEGRATED THIN FILM THICKNESS GAUGE AND METHOD FOR THE GAUGE,申请号KR20020081055-传众专利搜索

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发明名称	THIN FILM THICKNESS GAUGING METHOD USING CsITl SCINTILATOR, INTEGRATED THIN FILM THICKNESS GAUGE AND METHOD FOR THE GAUGE
摘要
申请公布号	KR100497715(B1)	申请公布日期	2005.06.28
申请号	KR20020081055	申请日期	2002.12.18
申请人		发明人
分类号	G01N21/47;(IPC1-7):G01N21/47	主分类号	G01N21/47
代理机构		代理人
主权项
地址

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