发明名称 A process for doping semi-conductor material with boron
摘要 A silicon rod is doped with boron by forming a longitudinal slit in the rod, introducing a mixture of boron powder having a particle size of 5-500m and water glass into the slit, heating the rod to 900 DEG C. for 3 hrs. to remove free and combined water, passing a molten zone through the rod, removing the resulting surface slag by scraping, and passing one or more molten zones through the rod, preferably in the absence of a crucible. The boron particle size is preferably 50-100m . A monocrystalline rod may be produced using a seed crystal, during the passage of the second molten zone. The resistivity of the silicon may be reduced from 500 to 4 X 10-3 ohm-cm. Specification 919,837 is referred to.
申请公布号 GB931692(A) 申请公布日期 1963.07.17
申请号 GB19620018536 申请日期 1962.05.14
申请人 SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT 发明人
分类号 C30B13/10;H01L21/00;H05K3/18 主分类号 C30B13/10
代理机构 代理人
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