| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve for chemical solution for preventing dripping and suction of chemical solution generated by a change in the internal volume of the valve, and preventing deterioration of the movable section of a valve element in the valve for chemical solution that is provided on a channel in which liquid flows, rocks the valve element in abutting on or separating from a valve seat for controlling fluid, and separates the inside of the valve for chemical solution into a channel section and an operation section. SOLUTION: The valve for chemical solution comprises a rod-like section 10b formed inside the channel 12a, a spherical valve section 10a that is formed at the tip of the rod-like section 10b and abuts on or is separated from the valve seat 14, and a membrane section 10c that is extended from the upper section of the rod-like section 10b and is formed in one piece with the spherical valve section 10a and the rod-like section 10b. A diaphragm valve element 10 for separating the channel 12a from working space 21 can be rocked via a rod 23 by a piston 33. COPYRIGHT: (C)2005,JPO&NCIPI
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