| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure mask for forming a three-dimensional figure by exposure, the mask having a simple structure and giving a sufficient number of gray scales. <P>SOLUTION: In the exposure mask M to be used for an exposure apparatus S, a plurality of pattern blocks comprising a pair of a light blocking pattern to block light emitting from the exposure apparatus S and a transmissive pattern to transmit the light are continuously arranged in such a manner that the pitch of the continuous pattern blocks is constant while a ratio of the light blocking pattern to the transmissive pattern is gradually varied. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
