MANUFACTURING METHOD OF FLEXIBLE METAL FOIL POLYIMIDE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a flexible metal foil polyimide substrate for continuously manufacturing the flexible metal foil polyimide substrate without deterioration of metal foil due to oxidation and with superior surface nature. SOLUTION: In the manufacturing method of the flexible metal foil polyimide substrate, metal foils are overlapped on both sides of a compound film where polyimide layers whose glass transition point is 300°C are laminated on both sides of a polyimide film whose glass transition point is 350°C. They are continuously heated and pressed in a vacuum atmosphere whose degree of vacuum is 5 torrs or less or in a nitride atmosphere whose oxygen concentration is 0.5 vol %. COPYRIGHT: (C)2005,JPO&NCIPI