METHOD FOR MANUFACTURING GLASS SUBSTRATE WITH TIN OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a glass substrate with a tin oxide film with which electric conductivity can surely be improved by a simple method without lowering transmissivity. SOLUTION: The glass substrate with the tin oxide film is manufactured by forming the tin oxide film of a thickness 500 to 1,000 nm by a pyrolysis method using a tin tetrachloride as a raw material on a glass substrate and heat-treating the tin oxide film at 300 to 650°C in a nonoxidizing atmosphere. COPYRIGHT: (C)2005,JPO&NCIPI