发明名称 EXTRACTOR/BUFFER
摘要 An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.
申请公布号 WO2005057614(A2) 申请公布日期 2005.06.23
申请号 WO2004US40055 申请日期 2004.12.01
申请人 BROOKS AUTOMATION, INC. 发明人 FOSNIGHT, WILLIAM, JOHN;BUFANO, MICHAEL;FRIEDMAN, GERALD;SULLIVAN, ROBERT
分类号 B65G1/00;H01L;H01L21/677 主分类号 B65G1/00
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