| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device for removing frictional heat, surely preventing clogging of a film, preventing the deterioration in a work environment and adverse influence on the environment when treating a waste liquid, eliminating a temperature difference between the inside and outside in a processing surface, and finishing a further uniform and highly accurate work, even in a state of covering the work with a lapping film. SOLUTION: This lapping device processes the work W by pressing an abrasive grain surface of the lapping film 11 to the work W. The lapping device can not only prevent the deterioration in the work environment and the adverse influence on the environment when treating the waster liquid but also can easily remove the frictional heat generated between the lapping film 11 and the work W by heat of vaporization in transpiration by transpiring fluid supplied in lapping by cooling the work W by supplying the fluid in a mist shape to the processing surface vicinity of the work W, and can finish the further uniform and highly accurate work by eliminating the temperature difference between the inside and outside of the lapping film 11. COPYRIGHT: (C)2005,JPO&NCIPI |
