HOT FILM AIR MASS SENSOR CONTACTED BY MEANS OF AN ANISOTROPIC CONDUCTIVE GLUE

摘要

The invention relates to a hot film air mass sensor comprising a sensor chip (3) provided with a sensor membrane (4), and an electronic substrate structure (22). At least one heating element (11) and at least one temperature sensor (12, 13; 31, 32) are arranged on the sensor membrane (4). The sensor chip (3) and the electronic substrate structure (22) are contacted by means of an anisotropic conductive glue.