ACTUATOR DEVICE MANUFACTURING METHOD AND LIQUID JET DEVICE

摘要

A method for manufacturing an actuator device having improved durability and reliability realized by preventing a vibratory plate from separating and a liquid jet device are disclosed. The method comprises a step of fabricating a vibratory plate on one side of a base and a step of fabricating a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibratory plate. The vibratory plate fabricating step includes an insulating film forming substep at which a zirconium layer is formed on the one side of the base by sputtering, inserting the base having the zirconium layer into a thermally oxidizing furnace heated above 700°C at speed of 200 mm/min or more, and thermally oxidizing the zirconium layer thereby to form an insulating film of zirconium oxide.