SPRING ELECTRODE MADE FROM SILICON, AND ANISOTROPIC ELECTRIC CONDUCTION SHEET

摘要

PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet that can cope with a more minute and narrower pitch electrode, and provide the electrode to use for it. SOLUTION: A member of a curved leaf spring shape is formed from a single crystal silicon material by anisotropic etching, and the silicon spring electrode 1 is manufactured by gilding its surface. This spring electrode 1 is fitted into a through-hole installed in the silicone rubber sheet and fixed. COPYRIGHT: (C)2005,JPO&NCIPI