FLEXIBLE BEAM SENSOR FOR MEASURING EXCESS FLOW AND MASS FLOW, AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a flexible beam sensor which is robust and can universally be used as an excess flow sensor for measuring the mass flow rate of a liquid and/or gaseous bed material to send out measurements of higher accuracy, as far as possible. SOLUTION: This flexible beam sensor contains a flexible beam arranged in a fluid flow, which is tied immovably to the wall on one end and is provided with an elongation-measuring device on its immovably-tied end. Additionally, the elongation measuring device has at least two piezoresistive sensor elements. COPYRIGHT: (C)2005,JPO&NCIPI