发明名称 MEASURING METHOD OF ECCENTRICITY
摘要 PROBLEM TO BE SOLVED: To provide a method for efficiently and accurately measuring eccentricity of each refraction layer for a transparent cylinder, having a plurality of coaxial refraction layers. SOLUTION: The method is for measuring eccentricity or eccentric degree of arbitrary two layers in a transparent cylinder, having a plurality of coaxial refraction layers using a refractive index distribution measuring device. For at least one diameter direction of the cylinder, refraction angles are measured for the whole cylinder, to obtain the refractive index distribution and two locations r<SB>i0</SB>, r'<SB>i0</SB>and refraction anglesϕ<SB>i</SB>,ϕ'<SB>i</SB>having specific refractive index values in each refraction layer (i). For at least one direction (j) which is different from the diameter direction, by taking in refraction angle data near the boundary of each refraction layer (i), locations r<SB>ij</SB>, r'<SB>ij</SB>, having the refraction anglesϕ<SB>i</SB>,ϕ'<SB>i</SB>corresponding to the specific refractive index values of each refraction layer (i), are obtained. By calculating the equation for a circle or an ellipse, using least square method and the like from these location data [r<SB>i0</SB>, r'<SB>i0</SB>to r<SB>ij</SB>, r'<SB>ij</SB>], the coordinates of the origin of each refractive index distribution layer are obtained, and the eccentricities or the eccentric degrees of between 2 arbitrary layers are obtained. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005164491(A) 申请公布日期 2005.06.23
申请号 JP20030406135 申请日期 2003.12.04
申请人 SHIN ETSU CHEM CO LTD 发明人 TAYA MINORU
分类号 G01B11/00;G01M11/00;(IPC1-7):G01M11/00 主分类号 G01B11/00
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