| 摘要 |
PROBLEM TO BE SOLVED: To provide a stripe image measurement data synthesis method which can obtain the result having high accuracy, by the synthesis using the data in which the measurement is performed at the best accuracy, from the plurality of measurement data pieces. SOLUTION: The method includes: a step for obtaining a plurality of phase distribution data pieces by performing phase analysis of a plurality of phase shifted stripe image data pieces; a step for determining the evaluation value for each pixel, from the associated stripe image data with respect to each phase distribution data piece; and a step for the synthesis by selecting, for each pixel, one having the high evaluation value from the plurality of phase distribution data pieces. COPYRIGHT: (C)2005,JPO&NCIPI
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