| 摘要 |
PROBLEM TO BE SOLVED: To prevent an energy generation element or the like provided on a silicon substrate from getting damaged and prevent a silicon nitride film or the like from getting damaged in particular in a process after an ink supply opening is formed. SOLUTION: In the precursor 20 of an inkjet recording head, a silicon oxide film 3 and a silicon nitride film 4 are sequentially formed on the silicon substrate 1. An energy generation element 2 providing discharge energy to an ink is formed between the silicon nitride film 4 and the silicon substrate 1. A resin film 7a functioning as the protective layer of the silicon nitride 4 is formed on the top face side of the precursor 20 and a mask member (resin film 7b) for an ink channel 13 is formed on the rear side. Wet etching is performed from the rear side of the silicon substrate 1 to form a through hole as an ink supply opening 13 on the silicon substrate 1. After that, the resin film 7a or the like on the through hole is removed. COPYRIGHT: (C)2005,JPO&NCIPI
|
