| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for observation capable of obtaining the image of a testpiece with an improved S/N ratio. SOLUTION: The method for observation comprises a step for obtaining the images of a plurality of testpieces by gradually varying the distance of the focal position of a charged particle beam to the surface to be observed of the testpiece to detect the images of the testpieces at each focal position of the charged particle beam, a step for evaluating focusing states by the charged particle beams in image data for each position in the images for each testpiece, a step for extracting the image data of the best focusing state for each position in the same image for the image data of each image of the testpiece, a step for producing a composite image by matching the extracted best image data to each position in the image, and a step for outputting the produced composite image as an observation image. Also, the observation device comprises a step for executing the steps. COPYRIGHT: (C)2005,JPO&NCIPI
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