| 摘要 |
When a plate-shaped material, such as a CSP substrate, that does not require exact precision is divided, in order to divide a workpiece by cutting the workpiece efficiently in a suitable manner, a cutting machine is provided with not only the first and second chuck tables, but also the first and second cutting units. Then, plate-shaped materials are placed on the respective chuck tables, and each plate-shaped material is aligned immediately before it is cut, so that the Y-axis index control and the X-axis cutting movement control are established for the cutting by the first and second cutting units. A cutting portion in the first direction on the plate-shaped material is cut by the first cutting unit according to the Y-axis index control and the X-axis cutting movement control, and subsequently a cutting unit in the second direction is cut by the second cutting unit. Hence, the cutting portions in different directions on the plate-shaped materials placed on the first and second chuck tables are cut by the first and second cutting units by sharing a role.
|
