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发明名称
Arbeitseinheit für Reinraumsysteme
摘要
申请公布号
DE10259252(B4)
申请公布日期
2005.06.23
申请号
DE20021059252
申请日期
2002.12.17
申请人
ASYS AUTOMATIC SYSTEMS GMBH & CO. KG
发明人
HUEGLER, KLAUS
分类号
H01L21/677;(IPC1-7):B65G49/07
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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