发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device having an excellent characteristic and reliability. <P>SOLUTION: The semiconductor device comprises a base insulating film 102 having a recess 120; a first semiconductor section 103a including a part formed on the base insulating film and a first overlap part overlapped with the recess; a second semiconductor section 103b including a part formed on the base insulating film and a second overlap part overlapped with the recess and opposed to the first overlap part; and a third semiconductor section 103c positioned between the first and second semiconductor sections and including a part located above the recess. The semiconductor device also comprises a semiconductor structure 103 having the width of the overlap of the first overlap part equal to that of the second overlap part; a gate electrode 116 including a first electrode section for covering the upper and side surfaces of the third semiconductor section and a second electrode section formed within the recess; and a gate insulating film disposed between the semiconductor structure and the gate electrode. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005167132(A) |
申请公布日期 |
2005.06.23 |
申请号 |
JP20030407367 |
申请日期 |
2003.12.05 |
申请人 |
TOSHIBA CORP |
发明人 |
HIEDA KATSUHIKO;MATSUZAWA KAZUYA;HAGISHIMA DAISUKE |
分类号 |
H01L29/423;H01L21/336;H01L21/8242;H01L27/108;H01L27/12;H01L29/49;H01L29/786 |
主分类号 |
H01L29/423 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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