| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an electrooptical device that performs image display of high quality. SOLUTION: A plurality of pixel parts are formed in an image display region on a substrate and a circumferential circuit is formed in a circumferential region of them. A lower insulating film is formed on the substrate before or after the step of forming the circumferential circuit. Then, an upper insulating film is formed on one surface of the substrate and its surface is subjected to CMP (chemicalmechanical polishing) processing. At this time, recesses are formed on (i) the surface of the substrate or (ii) the surface of the lower insulating film which forms the backing of a film constituting a portion of the circumferential circuit before or after, or in parallel to the step of forming the circumferential circuit so that the density of projections formed on the surface of the upper insulating film in the circumferential area approximates the density of projections formed on the surface of the upper insulating film in the image display area. COPYRIGHT: (C)2005,JPO&NCIPI |
