| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for detecting position by which the position of a reflection-type optical member can be detected highly accurately. SOLUTION: The device detects the relative positional relation between a reflection-type original plate on which a position detecting mark is formed and a stage on which the original plate is placed and a reference mark is provided. The device comprises an optical illumination system which emits light for illuminating the position detecting mark or reference mark, an optical detection system which introduces reflected light from the position detecting mark or reference mark to an image picking-up means, and a changing means which changes the contrast of the mark signal of the position detecting mark or reference mark detected by means of the image picking-up means. COPYRIGHT: (C)2005,JPO&NCIPI |
