发明名称 Vertical gate semiconductor device and method for fabricating the same
摘要 A first region 11 functioning as a transistor includes a drain region 111 , a body region 112 formed over the drain region 111 , a source region 113 A formed over the body region 112 and a trench formed through the body region 112 and having a gate electrode 120 buried therein. A source region 113 B is formed over the body region 112 extending in a second region 12.
申请公布号 US2005133861(A1) 申请公布日期 2005.06.23
申请号 US20040962573 申请日期 2004.10.13
申请人 MATSUSHITA ELECRIC INDUSTRIAL CO., LTD. 发明人 MIZOKUCHI SHUJI;YAMANAKA MITSUHIRO;GUNJI HIROYUKI
分类号 H01L21/331;H01L21/336;H01L21/8234;H01L29/06;H01L29/08;H01L29/10;H01L29/417;H01L29/739;H01L29/78;(IPC1-7):H01L21/823;H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/331
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