PLASMA DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma discharge device capable of providing a uniform energy distribution over a wide range even for a rotating disc-like processing object.

SOLUTION: This plasma discharge device is so structured that a pulse voltage is applied to a pair of rod-like discharge electrodes 6 and 7 to generate corona discharge between the discharge electrodes 6 and 7; and an excitation seed including plasma generated by the corona discharge is radiated to a surface of a processing object W. The pair of rod-like discharge electrodes 6 and 7 are formed into asymmetrical shapes; the one-side discharge electrode 6 is formed into a nearly V-shaped form; a tip part 6a of the discharge electrode 6 is positioned in a peripheral part of the disc-like processing object W processed with rotation; a bent led-out base end part of the other-side discharge electrode 7 formed in a nearly V-shaped form is positioned at a rotation center part of the processing object W processed with rotation; and the tip part 6a of the one-side discharge electrode 6 and the tip part 7a of the other-side discharge electrode 7 are positioned at different phase heights on an axis along the plasma emission direction.

COPYRIGHT: (C)2005,JPO&NCIPI