| 摘要 |
PROBLEM TO BE SOLVED: To provide an algorithm for analyzing the polarization state of incident light from an intensity distribution pattern to be measured, in a polarization analysis apparatus and an ellipsometer using a wave plate array and a polarizer array and having no driving part. SOLUTION: Either or both algorithms are used, in a method for determining incident polarization by fitting mathematically a pattern shape or matching with a database or in a method for determining incident polarization from a frequency component acquired by performing Fourier transform of the pattern shape, as an analysis procedure of a two-dimensional intensity distribution pattern observed by a light-receiving element array. The methods are very effective because the deviation quantity can be corrected by itself even when the phase difference of the wave plate array is deviated from a design value. In addition, polarization analysis having higher accuracy can be performed as the need arises by adopting a signal processing method for removing a signal from a light-receiving element region receiving unnecessary scattered light or diffracted light. COPYRIGHT: (C)2005,JPO&NCIPI
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