| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe apparatus, a scanning probe microscope, and a sample display method for simplifying a constitution for obtaining information indicating the distance between the tip of a probe and a sample. SOLUTION: A metal wire 3 has a tip 3a as the tip of the probe, and is held by a holder 9 and a crystal oscillator 4. The crystal oscillator 4 outputs oscillation information, indicating self-oscillation by piezoelectric effect. A resonator comprises the metal wire 3 and the crystal oscillator 4 and is oscillated by resonance. Since a force, corresponding to the distance between the tip 3a and the sample 1, is applied to the resonator by an interaction between the tip 3a and the sample 1, the oscillations of the resonator fluctuate, in response to the distance between the tip 3a and the sample 1. The oscillation information output from the crystal oscillator 4 indicates the distance between the tip 3a and the sample 1. The need for a light emitter and a light receiver, conventionally required for obtaining the information indicating the distance between the tip 3a and the sample 1, can be eliminated. COPYRIGHT: (C)2005,JPO&NCIPI
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