| 摘要 |
PROBLEM TO BE SOLVED: To prevent a particle from being mixed in a delivering register liquid. SOLUTION: A delivery mechanism 8 is provided with a delivery pump 80, a liquid supply part 88 and a discharge mechanism 89. A body part of the delivery pump 80 is composed of a syringe 81, an upper cover 85 and a lower cover 86. A storage tank 860 is arranged in the lower cover 86. Liquid 91 of the same component as a solvent of the register liquid is supplied to the storage tank 860 from the liquid supply part 88, and an atmosphere of exposing an inner surface 812 of the syringe 81, is set in the same component as the solvent of the register liquid. COPYRIGHT: (C)2005,JPO&NCIPI
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