| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive gate valve for vacuum of long service life capable of surely performing the sealing in a valve close state, surely performing the valve opening operation by releasing the valve close state, further reducing the abrasion and damage of a seal member, and minimizing the generation of particles. SOLUTION: This gate valve for vacuum is constituted to expand an expansion shutoff driving member by supplying the air inside of the expansion shutoff driving member, and to press a valve plate to an opening side to seal and close an opening by the seal member of the valve plate, at a valve close position. The expansion shutoff releasing driving member is expanded by stopping the supply of the air into the expansion shutoff driving member and supplying the air inside of the expansion shutoff releasing driving member, to move the valve plate in the direction to be separated from the opening, and to release a sealed shutoff state of the opening by the seal member of the valve plate. COPYRIGHT: (C)2005,JPO&NCIPI
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