Method for manufacturing a split probe

摘要

In order to provide a simple method for manufacturing a more finely detailed split probe with less damage being incurred, by tilting the whole of the microcantilever 6 , it is possible to easily determine the center of the probe tip and decide processing position. Channel processing 1 and 2 is carried out using a small focused ion beam current over an extremely narrow range of the processing position. A channel 3 spanning a broad range connected to the channels 1 and 2 is processed using a focused ion beam current larger than the aforementioned focused ion beam current used at the channel processing of the channels 1 and 2 , and the electrodes are cut.