| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle sticking apparatus requiring no exchange of a mask stage. <P>SOLUTION: The pellicle sticking apparatus is to be used to stick a pellicle to an exposure mask for forming an FPD (Flat Panel Display) substrate, and it functions by holding a mask and a pellicle between a mask pressurizing plate and a pellicle pressurizing plate, pushing the pellicle via the pellicle pressurizing plate by a pushing means to the mask so as to stick the pellicle to the mask between the pressurizing plates. A mask stage holding the mask has a holder to grip the mask at each side. The holder moves in the longitudinal direction and in the lateral direction of the mask stage responding to the longitudinal and lateral dimensions of the mask to grip the mask at four sides. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
