| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for enhancing resolution at observation of the cross section of a feature pattern (to be abbreviated, hereinafter as "features") present in the surface of a substrate. SOLUTION: A layer of a contrast-enhancement agent is applied to the feature on a substrate. A second agent, having milling properties different from those of the contrast-enhancing agent and substantially similar to the features, is applied and superposed on the contrast-enhancing agent for milling the features on the substrate. The formation of images of the features and the storage of the images can be obtained. COPYRIGHT: (C)2005,JPO&NCIPI |
