| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet stretcher capable of stably and surely stretching a sheet by a small-sized simple mechanism. SOLUTION: In the sheet stretcher stretching the wafer sheet 8 by lowering a holding plate 6 holding a wafer ring 8, a holding plate lifting-lowering mechanism lifting and lowering the holding plate 6 is formed in a constitution in which a feed screw 12a for a lifting-lowering driving shaft 12 is screwed to a nut member 22 connected to the holding plate 6. A following gear 20 connected at the lower end of the driving shaft 12 is engaged with an engaging tooth 19b for a gearing 19. A rotation is transmitted to the driving shaft 12 by rotating and driving the gearing 19 through an intermediate gear by a motor. Accordingly, a revolving torque can be transmitted without loading a bending load to the driving shaft 12, and the sheet stretcher capable of surely stretching the sheet by the small-sized simple mechanism is realized. COPYRIGHT: (C)2005,JPO&NCIPI |
