| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser monitor where, in an apparatus for performing film deposition or working using a laser, in measuring the intensity of laser light using the monitor placed on the outside of the vacuum device, the intensity of the laser light made incident on a target can be directly measured without breaking a vacuum in the vacuum device and without being influenced by stain of a laser incidence window or the like. SOLUTION: A photosensor is installed inside a vacuum device, and the intensity of the laser light directly before irradiation to an object is measured. At this time, the photosensor is made movable by a straight line introduction apparatus or the like, is inserted into the surface of a laser light path before and after film deposition (or working), and is deviated from the light path during the film deposition (working). COPYRIGHT: (C)2005,JPO&NCIPI
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