IMPROVEMENT IN PERFORMANCE IN MODEL-BASED OPTICAL PROXIMITY CORRECTION ENGINE UTILIZING EFFICIENT POLYGON PINNING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for carrying out model-based optical proximity correction by disposing a mask matrix having a region of interest (ROI) and locating a plurality of points of interest within the mask matrix, and to provide a program storage device for executing the above method.

SOLUTION: A first polygon 200 having a plurality of vertices representative of the located points of interest is computed, followed by determining a spatial relationship between the vertices and the ROI 100. The vertices of the first polygon are pinned to boundaries of and within the ROI to form a second polygon 300 on the ROI. This processing is repeated for all vertices of the first polygon to collapse the second polygon on the ROI. The collapsed second polygon is used to correct for optical proximity.

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