| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase irradiation quantity and irradiation area with excited species for a surface of an object to be treated without needing injection of air or the like, to uniformly irradiate with them throughout the surface, and to restrain loss of effective excited species to remarkably improve treatment performance and treatment efficiency. <P>SOLUTION: This method is used for carrying out a surface treatment by generating excited species including plasma by corona discharge generated between electrode tip parts 1a, 1a by applying a pulse voltage to a pair of discharge electrodes 1, 1 facing to each other. A magnetic field is formed by a magnetic field formation means comprising a permanent magnet 4, a magnetic body 5 and a ball piece 6 in the vicinity of the tip parts 1a, 1a of the discharge electrodes 1, 1; and the excited species are jetted toward a surface Wf of an object W to be treated by Lorentz force pressingly acting on charged particles in plasma moving in the magnetic field to carry out the surface treatment. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
